Overview

Indicative content includes:

• Mechanical properties of structures.
• Electrostatic forces.
• Guided waves in the RF and optical domains.
• Photonic chip technology.
• Optical MEMS systems: Waveguides, Mirrors, etc.
• RF MEMS systems: Inductors, capacitors, switches, etc.
• Microfabrication for MEMS.
• Using software (e.g.COMSOL) for MEMS analysis and design.

Assessment Strategy

-threshold -Equivalent to 50%.Uses key areas of theory or knowledge to meet the Learning Outcomes of the module. Is able to formulate an appropriate solution to accurately solve tasks and questions. Can identify individual aspects, but lacks an awareness of links between them and the wider contexts. Outputs can be understood, but lack structure and/or coherence. -good -Equivalent to the range 60%-69%.Is able to analyse a task or problem to decide which aspects of theory and knowledge to apply. Solutions are of a workable quality, demonstrating understanding of underlying principles. Major themes can be linked appropriately but may not be able to extend this to individual aspects. Outputs are readily understood, with an appropriate structure but may lack sophistication. -excellent -Equivalent to the range 70%+.Assemble critically evaluated, relevant areas of knowledge and theory to constuct professional-level solutions to tasks and questions presented. Is able to cross-link themes and aspects to draw considered conclusions. Presents outputs in a cohesive, accurate, and efficient manner.

Learning Outcomes

• Design, model, analyse and evaluate MEMS systems using analytic and numerical simulation tools for mechanics and electromagnetics.

• Understand the intersection of MEMS concepts with modern guided wave and integrated photonics technology .

• Understand the underlying principles of MEMS technology, including device fabrication.